Vacuum System
- Company Name:AlphaPlus Co., Ltd.
- Membership:Free Member
- Member Since:2003. 12.12
- Country/Region:Korea
- City:Gyeongsangbuk-do
- Contact:SU KYUNG, KO
- Related Keywords:Vacuum Evaporation System, Thermal Evaporation System, Thin Film
AlphaPlus Co., Ltd.
Contact us
AlphaPlus Co., Ltd.
[Korea]
- Address
- #207-212, Pohang Techno Park 2, 394, Jigok-ro, Nam-gu Pohang-si, Gyeongsangbuk-do
- Phone
- 82-54-2232351
- Contact name
- SU KYUNG, KO
Description
Magnetron Vacuum System
- Static Vacuum System
- Co-Vacuum System
- Reactive Vacuum System
- Rotating Planarity Vacuum System
- Rotating Drum Vacuum System
- Cluster Tool Vacuum System
- In-line Vacuum System
Specification
|
Model |
ALPS SS Series |
ALPS CS Series |
ALPS PS Series |
ALPS CT Series |
|
Composition Type |
Static Sputter |
Co- Sputter |
Planetary Sputter |
Cluster Tool Sputter |
|
Substrate for Processing |
2 inch x 7 sheets |
4 inch x 1 sheets |
2 inch x 3 sheets |
4 inch |
|
Sputtering Gun |
1ea |
up to 4ea |
up to 4ea |
up to 4 (or 8)ea |
|
Loadlock |
Single / 10 Cassette / 25 Sheets (Cassette) |
25 sheets |
||
|
Transfer |
None / Vacuum Loadless Transfer / Vacuum Robot Arm |
Vacuum Robot Arm |
||
|
Options |
Substrate Precleaning. Reactive Deposition, |
|||
|
Purpose |
Mass Production / R & D |
|||
|
Remarks |
Rotating Drum Sputtering System, In-line Sputtering System |
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